Bellows-sealed rotary feedthroughsProduct catalog

These bellows-sealed rotary feedthroughs are available with high-precision rotary feedthroughs and compact rotary feedthroughs as a unit and conduction rotational motion from the atmosphere side to the vacuum unit. They can be used in regions up to high vacuums because metal welded bellows are used for isolation between the vacuum and atmosphere.
We offer two types of compact rotary feedthroughs. One type includes a rotational positioning accuracy (at no load) of 2°±0.5°, while the other type includes high-precision rotary feedthroughs with an accuracy of as high as 0.5°.

Photo of compact rotary feedthrough


Schematic diagram (IRC)

Diagram of rotary feedthroughs

Common specifications

Model IRC-34 IRC-70 IRP-70
Drive method Manual
Leak rate 1×10-10Pa・m3/s or less
Baking temperature 150°C or less 120°C or less
Main material SUS304
Bellows material SUS316L
Rotation life 100,000 rotations

List of bellows-sealed rotary feed throughs

Name Model Connection flange End shaft diameter Rotational positioning accuracy (at no load) Product drawing download
Compact rotary feedthroughs
Detailed specifications
IRC-34 CF34 φ6(f6) 2°±0.5° pdf format
dxf format
IRC-70 CF70 φ8(f6) pdf format
dxf format
High-precision rotary feedthroughs
Detailed specifications
IRP-70 CF70 φ10(e7) 0.5°±0.05° pdf format
dxf format

<When ordering>
Detailed specifications and dimensions are also introduced in product catalogs.
For delivery time, price and other questions about products, please inquire from there.
In addition to the above standard products, we also design and manufacture individually for each customer request. Please feel free to consult us.

Products guidance

Metal bellows Metal bellows
Welded bellows
Formed bellows
Flexible tubes
Vacuum valves Vaccum valves
Rectangular type gate valves
Round type gate valves
Large-size rectangular type
gate valves
L-shape valves
(Angle valves)
Vacuum piping Vacuum piping parts
Flanged pipes
Pipe parts
Flexible tubes
L-shape valves
(Angle valves)
Vacuum chamber Vacuum chamber
Feedthroughs Feedthroughs
Linear feedthroughs
Rotary feedthroughs
Magnetic feedthroughs
Menu by field
Semiconductor field
Bellows, Valves, Piping, Chambers
FPD (flat panel display) field
Bellows, Valves, Piping
PV (photovoltaic battery) field
Bellows, Valves, Piping
Railways and other
Conservators, Load sensing valves,
I-shape flexible tubes
Accelerator and nuclear fusion field
Feedthroughs, Chambers