High-vacuum L-shape valve (angle valve: formed bellows shaft seal: 16A~65A)

Model designation^ordering number description

*1: 50,000 repetitions for manual type.
*2: LX Series does not include a manual type.
Symbol Repetition life
No entry 100,000 repetitions (*1)
LX 1 million repetitions (*2)
Angle valve symbol
Symbol type
D Automatic,double-action
C Automatic, single-acting
(normally closed)
O Automatic, single-acting
(normally open)
M Manual
Ordering Number Description
Symbol Flange types
1 NW-KF flange
2 con-flat flange
3 JIS(VG,VF) flange
* One-side stationary,one-side rotating
Symbol Flange types
16 NW-KF flange
JIS(VG,VF) flange
25
40
50
63(65)
70 con-flat flange
114
Symbol Accessories
0 None
1 With solenoid valves,proximity switch
2 With solenoid valves
3 With proximity switch

Note 1j Be sure to specify power supply specifications if you need an optional solenoid valve.

Order form

Repetition life
Flange type
Size
Type
Accessories
Number
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Specifications

Working pressure Atmospheric temperature to 1 x 10(-6) Pa
Leak volume Below 1 x 10(-10) PaEm3/s
Repetition life FLV (automatic) 100,000 repetitions
FLV (manual) 50,000 repetitions
LX- FLV (automatic) 1 million repetitions
Operating pressure 0.5 to 0.6 MPa (automatic)
Bake-out temperature
(heat endurance limit)
Valve body 120ŽiMAXj
Pneumatic actuator 65ŽiMAXj
In the case of those with solenoid valve50ŽiMAXj
Main materials Valve body:SUS304
Bellows:SUS316L( FLV)
Hastelloy C-22(LX- FLV)
Cylinder: Aluminum
Valve seat seal: FKM(Viton®)
Bonnet seal: FKM(Viton®)

Name of main parts

Technical data

Conductance Model NO. 16A 25A 40A 50A (63A)
65A
 FLV 4l/sec 10l/sec 32l/sec 70l/sec 107l/sec
LX- FLV 3l/sec 9l/sec 27l/sec 52l/sec 93l/sec

Automatic (Single acting/Double acting [normally open/closed])

WITH NW-KF FLANGES
1FLV SERIESELX-1FLV SERIES
WITH CF FLANGES
2FLV SERIESELX-2FLV SERIES
WITH JIS FLANGES
3FLV SERIESELX-3FLV SERIES
Image of 1FLV Image of 2FLV Image of 3FLV

Schematic diagram

Schematic diagram of 1FLV Schematic diagram of 2FLV Schematic diagram of 3FLV

Dimensions table (automatic: double-acting D, single-acting C [normally closed]

CAD drawing download (member registration required)

Model No. A B C D E F ƒำH ƒำJ K N-ƒำh Approximate
Weight(kg)
drawings
PDF
(LX)1FLV -16D.C.O 132.5 93 47 50 22.5 40 40 30 - - 0.7 2D
3D
" -25D.C.O 141.5 101.5 59 62 24.5 50 54 40 - - 1.1 2D
3D
" -40D.C.O 168 117.5 81 84.5 33 65 76 55 - - 2.1 2D
3D
" -50D.C.O 186.5 128.5 92 92 39 70 89 75 - - 3.1 2D
3D
" -63D.C.O 229 163.5 110 110 45.5 88 110 87 - - 5.6 pdf
(LX)2FLV -70D.C.O 173 122.5 81 84.5 33 70 76 69.3 58.7 6-6.6 2.5 pdf
" -114D.C.O 201.5 143.5 92 92 39 85 89 113.5 92.2 8-8.5 5.0 pdf
(LX)3FLV- -25D.C.O 151.5 111.5 59 62 24.5 60 54 90 70 4-10 1.8 pdf
" -40D.C.O 173 122.5 81 84.5 33 70 76 105 85 4-10 3.2 pdf
" -50D.C.O 199.5 141.5 92 92 39 83 89 120 100 4-10 4.5 pdf
" -65D.C.O 241 175.5 110 110 45.5 100 110 145 120 4-12 7.4 pdf

ManualiManual: Mj

WITH NW-KF FLANGES
1FLV SERIES
WITH CF FLANGES
2FLV SERIES
WITH JIS FLANGES
3FLV SERIES
Image of 1FLV Image of 2FLV Image of 3FLV

Schematic diagram

Image of 1FLV Image of 1FLV Image of 1FLV

Dimensions table(Manual: Mj)

CAD drawing download (member registration required)

Model No. A B ƒำH ƒำD E F ƒำJ K N-ƒำh Approximate
Weight(kg)
drawings
PDF
1FLV -16M 124.5 47 40 43 6 40 30 - - 0.6 2D_pdf
3D_pdf
" -25M 136 59 54 43 8 50 40 - - 1.0 2D_pdf
3D_pdf
" -40M 163 81 76 60 15 65 55 - - 1.6 2D_pdf
3D_pdf
" -50M 176.5 92 89 60 20 70 75 - - 2.3 2D_pdf
3D_pdf
" -63M 204.5 110 110 60 25 88 87 - - 4.1 pdf
2FLV -70M 168 81 76 60 15 70 69.3 58.7 6-6.6 2.1 pdf
" -114M 191.5 92 89 60 20 85 113.5 92.2 8-8.5 4.2 pdf
3FLV -25M 146 59 54 43 8 60 90 70 4-10 1.6 pdf
" -40M 168 81 76 60 15 70 105 85 4-10 2.7 pdf
" -50M 189.5 92 89 60 20 83 120 100 4-10 3.8 pdf
" -65M 216.5 110 110 60 25 100 145 120 4-12 5.8 pdf

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