아이케이씨코리아@주식회사Designers and manufacturers of Vacuum Valves, and Vacuum Equipment
| 08 | 8인치용 For8" |
| 12 | 12인치용 For12" |
| VC | 밸브케이싱부속 With valve casing |
| DM | 직접장착 Direct mount |
| 옵션제품 번호 Optional product number |
옵션내용 Description |
| 00 | 표준제품:밸브판, 밸브케이싱재질/알루미늄 Standard products:Aluminum seal plate and casing |
| 01 | 옵션제품:밸브판, 밸브케이싱재질/SUS Optional products:Stainless steel seal plate and casing |
| 개구 사이즈 Gate size |
8":46~236 12":50~336 |
|---|---|
| 사용압력 Working pressure |
대기압 ` 1~10-6 Pa Atmospheric pressure to 1 x 10(-6) Pa |
| He누출량 He leak rate |
본체@1~10-10 PaEm3/s이하 실 플레이트@5~10-10 PaEm3/s이하i보증시간 min.60sec) Gate valve Max.1~10-10 PaEm3/s seal plate Max.5~10-10 PaEm3/simin.60sec guaranteed) |
| 대응 차압 Differential pressure |
정압 및 역압 Positive and negative pressures |
| 개폐 동작시의 차압 Differential pressure when open |
1000pa이하 Max.1000pa |
| OH싸이클 OH cycles |
100만회(권장 OH싸이클@단, 실재 제외 j 1million cycles (according to our verification test; however,this does not apply to seals) |
| 베이킹온도 Bake-out temperature |
MAX.120(공압실린더부는MAX.60) Max.120(max.60 for air cylinders) |
| 밸브개폐시간 Valve open/close time |
개폐 각0.9secΘγ Min.0.9 sec each |
| 사용공기압력 Pneumatic pressure |
0.5}0.5Mpa 0.5}0.5Mpa |
| 장착방향 Mounting posture |
구동부가 u천정v 또는 u지면v Drive section is turned to the top or bottom |
| 주요재료 Materials |
밸브케이싱,밸브판F알루미늄(표준)
또는SUS304 용접벨로우즈FAM350 OOFFKM(바이톤®) valve casing and seal plate:Aluminum(standard)or SUS304 Welded bellows:AM350 O-ring:FKM(Viton®) |
| 개폐검지 Opening/closing detection |
무접점 스위치 Read switch |
| 속도제어기 접속튜브 직경 Speed controller connection tube diameter |
[8"]Σ2개 [12"]Σ6 2개 [8"]2 Σ4tube [12"]2 Σ6tube |
| ‘파티클데이터/Particle data |
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| 사이즈/Size | A | B | C | D1 | D2 | E | F | G | h | I | J | K | L | M | N | P1 | P2 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 8"(46~236) | 340 | 262 | 322 | 236 | 46 | 112 | Σ4 | 450.5 | 57 | 393.5 | 103 | 300 | 285 | 50 | 310 | 251 | 61 |
| 12"(50~336) | 440 | 362 | 422 | 336 | 50 | 142 | Σ6 | 515.5 | 61.5 | 454 | 112 | 400 | 385 | 60 | 410 | 351 | 65 |
| 사이즈/Size | A1 | A2 | A3 | B1 | B2 | C1 | C2 | D1 | D2 | E | F | M | I | J | L1 | L2 | K1 | K2 | K3 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 8"(46~236) | 256 | 236 | 66 | 286 | 36 | 322 | 49 | 276 | 26 | 112 | Σ4 | 37.5 | 393.5 | 103 | 301 | 31 | - | - | - |
| 12"(50~336) | 356 | 336 | 70 | 386 | 46 | 422 | 59 | 376 | 36 | 142 | Σ6 | 47.5 | 454 | 112 | 401 | 41 | 182 | 212 | 25.5 |
