We are grateful for the number of visitors who visited our booth.
- The gate valve you can seal up with both sides
This gate valve is the structure with which both of both sides as well as a side can be sealed up. It's possible to exchange an O-ring of a gate valve plate while usually maintaining a vacuum on the transfer chamber side at the time of the operation time and maintenance. It's possible to continue producing. (The actual article exhibition)
- Nonevaporable getter(NEG) pump using oxygen-free Pd/Ti Thin Film
Non-evaporative getter pump exhausts of hydrogen (H2) and carbon monoxide (Co.) baked by 150 ℃ for 1.5-12 hours.
Even if the atmosphere opening and activation are repeated, exhaust velocity doesn't fall. Non-evaporation getter pump is most suitable as ultra-high vacuum pump of an accelerator, a radiation beam line, an electron microscope and the surface research capability.
In addition, A formed bellows with non-evaporative getter performance has been developed. (Exhibit only)
- Elevating and lowering welded bellows
An introduction is given to automatic elevating and lowering mechanisms of welded bellows that are not only used for semiconductor, liquid crystal, and vacuum equipment but also used as airtight sealing members for gases and fluids across a wide range of fields, such as accelerators, nuclear fusion, railways, and medicine. (Actual products on display)
Dates:December 11 (Wed) to 13 (Fri), 2019 10:00 am - 5:00 pm
Site:North Exhibition Hall, Tokyo Big Sight
Our booth:North Hall 4, No. 5138
Host: SEMI
For details, check https://www.semiconjapan.org/en/home