Provision of ultralarge-size gate valves and large-diameter bellows for FPD and PV manufacturing equipment

We have offered the “koslarze” brand for about 20 years after since the launch onto the market of our original concept of not bringing frictional parts into vacuum as the development policy of gate valves.

In the “GARIVA” series, further compactness, weight reduction, and cost reduction have been realized by minimizing the great surface pressure relative to the opening area under negative pressure through the adoption of the original differential pressure cancellation mechanism to respond to the ever-increasing upsizing of the panel market. Since development, we have maintained a delivery performance record and secured reliability in sputtering and CVD equipment (G6 - G8 in substrate size). With this achievement, we received the Chairman’s Prize from the Japan Vacuum Industry Association in 2004, and the Outstanding Performance Prize of the Excellent New Technologies and Products Award for small and medium-sized enterprises from the Ministry of Economy, Trade and Industry in 2006.

More recently, we are offering these products as a more refined item in the market to mount devices that continue to grow larger (G8 - G11) equipment.
In addition, these models have expanded into the PV market targeted at sputtering and PECVD equipment with the start of delivery to thin-film silicon and CIGS (compound) systems.

Meanwhile, we have launched onto the market large-size welded bellows for robot elevating mechanisms, with success in expansion/contraction speed designed for long strokes, long life, durability, and cost reduction, with the catch phrase “expert at expansion/contraction with high-dimensional airtightness.”

Commendation certificate of Japan Vacuum Industry Association Chairman’s Prize
Commendation certificate of the 18th Excellent New Technologies and Products Award for small and medium-sized enterprises
Commendation certificate of 2004 Japan Vacuum Industry Association Chairman’s Prize
(Development of differential pressure cancellation valve)
Commendation certificate of the 18th Excellent New Technologies and Products Award for small and medium-sized enterprises
(Development of differential pressure cancellation valve)
GARIVA
GARIVA

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Metal bellows Metal bellows
Welded bellows
Formed bellows
Flexible tubes
Vacuum valves Vacuum valves
Rectangular type gate valves
Round type gate valves
Large-size rectangular type
gate valves
L-shape valves
(Angle valves)
Vacuum piping Vacuum piping parts
Clamps
Flanged pipes
Pipe parts
Flexible tubes
L-shape valves
(Angle valves)
Vacuum chamber Vacuum chamber
Chamber
Feed throughs Feed throughs
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Rotary feedthroughs
Magnetic feedthroughs
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Semiconductor field
Bellows , valves, piping, chamber
FPD (flat panel display) field
bellows, valves, piping
PV (photovoltaic battery) field
Bellows, valves, piping
Railways and other
Conservators, load sensing valves,
I-shape flexible tubes
Accelerator and nuclear fusion field
cc chambers