Rectangular type gate valve/Rectangular type gate valve
KOSLARZE-2R GATE VALVES
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- We have realized improvement in maintainability by reducing the number of parts of the drive section of the high-vacuum gate valve having been developed for organic EL manufacturing vacuum film-forming equipment and optimizing parts placement.
- KOSLARZE-2R(KV-2R)
can cover wide-ranging opening sizes.
Overview
- IRIE KOKEN has developed a high-vacuum gate valve capable of LTPS and OLED.
Through the adoption
of the one-action valve mechanism by the cam system, we have realized improvement in maintainability by
designing compactly to the extent possible. KOSLARZE-2R covers wide-ranging opening sizes from
450mm semiconductor manufacturing equipment to large-size liquid crystal and photovoltaic manufacturing
equipment.
Features
- Particle-free
Through the adoption of a non-friction mechanism, a high level of cleanliness is kept inside
the equipment. - Superior seal performance
Due to our original groove shape, the seal
portion of the valve plate secures stable seal performance even under critical conditions,
such as prevention of metal contact. - Easy maintenance
Designed for easy maintenance. Types included with a valve casing are provided with a
maintenance flange on the top to facilitate mounting and removing the valve plate. - Long lifetime, high quality
With our unique bellows, quality and reliability to have a long lifetime are secured.
Specifications
Working pressure range | Atmospheric pressure~1×10-6Pa |
---|---|
He leak rate | Main body:1×10-10Pa・m3/s or less Valve plate:5×10-10Pa・m3/s or less |
Applicable differential pressure | Negative pressure, positive pressure, equal pressure |
Maintenance cycle | 1×106 repetitions (excluding valve plate O-rings) |
Materials (valve casing, valve plate) | SUS,A5052 |
We offer a valve casing type that mounts the valve casing to a chamber, and a direct mount type that
directly mounts the valve plate in the chamber of equipment.
For an estimate of other customized valves, submit a request from this page.
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products, click here.