Rectangular type gate valve/Rectangular type gate valve
KOSLARZE-2R GATE VALVES
* For details/estimate of the product, click here.
- We have realized improvement in maintainability by reducing the number of parts of the drive section of the high-vacuum gate valve having been developed for organic EL manufacturing vacuum film-forming equipment and optimizing parts placement.
can cover wide-ranging opening sizes.
- IRIE KOKEN has developed a high-vacuum gate valve capable of LTPS and OLED.
Through the adoption
of the one-action valve mechanism by the cam system, we have realized improvement in maintainability by
designing compactly to the extent possible. KOSLARZE-2R covers wide-ranging opening sizes from
450mm semiconductor manufacturing equipment to large-size liquid crystal and photovoltaic manufacturing
Through the adoption of a non-friction mechanism, a high level of cleanliness is kept inside
- Superior seal performance
Due to our original groove shape, the seal
portion of the valve plate secures stable seal performance even under critical conditions,
such as prevention of metal contact.
- Easy maintenance
Designed for easy maintenance. Types included with a valve casing are provided with a
maintenance flange on the top to facilitate mounting and removing the valve plate.
- Long lifetime, high quality
With our unique bellows, quality and reliability to have a long lifetime are secured.
|Working pressure range||Atmospheric pressure～1×10-6Pa|
|He leak rate||Main body：1×10-10Pa・m3/s or less
Valve plate：5×10-10Pa・m3/s or less
|Applicable differential pressure||Negative pressure, positive pressure, equal pressure|
|Maintenance cycle||1×106 repetitions (excluding valve plate O-rings)|
|Materials (valve casing, valve plate)||SUS,A5052|
We offer a valve casing type that mounts the valve casing to a chamber, and a direct mount type that
directly mounts the valve plate in the chamber of equipment.
For an estimate of other customized valves, submit a request from this page. and for questions about
products, click here.