Vacuum valveProduct catalog

What is a vacuum valve?

A vacuum valve isolates a vacuum and a vacuum or a vacuum and the atmosphere. It is used not only to isolate various processes for manufacturing displays and semiconductor substrates, but also to adjust the pressure of a vacuum chamber by placing it between the vacuum chamber and vacuum pump.

The vacuum valve is required to isolate a vacuum with heat, gas, plasma, etc. added to it, and also to be sufficiently airtight to isolate a vacuum from the atmosphere without destroying the vacuum.

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Rectangular type gate valve

This valve consists of a case (valve casing) having a rectangular opening for substrates to pass through, a partition plate (valve plate) to close the opening, and a mechanism (drive section) to operate the valve plate.

Each substrate placed in a treatment room is kept in a sealed environment by closing the gate valve, where it is exposed to heat, gas, plasma, etc., for various types of film formation. These processes are mostly performed under vacuum, and in order to maintain this environment, high seal performance is required for the gate valve. Among our products, KOSLARZE is compatible.

Features

After moving the valve plate to the opening position, the valve plate is pressed against the opening seat part. The valve plate incorporates an elastic material (O-ring), and its repulsive force secures seal performance. Linear motion to the opening position and tilting motion to the seal are performed by air cylinder(s) through bellows.

The movable part is isolated by bellows, and there are no metal frictional parts on the vacuum chamber side. The drive section is available in two types: one performs linear motion and tilting motion successively with a single one-way cylinder (KOSLARZE II), and the other performs linear motion and tilting motion individually with each cylinder (NEW KOSLARZE). Mainly, they are classified by high-speed performance (KOSLARZE II) and high seal performance (NEW KOSLARZE).

How to use

It is mounted as the valve casing is sandwiched by the front and back chambers. The shape is standard as a gate valve. Separately, there is another type, by which the opening section of a chamber is directly sealed by the valve plate (direct mount). In this case, the component parts do not include any valve casing. The valve plate can be detached/attached by one bolt, facilitating maintenance.

Round type gate valve

Having stable seal performance, this is a simply structured and compactly designed round, pendulum type valve. It is mainly used as a partition of an exhaust system by installing it between a treatment room (chamber) and vacuum pump. In order to adjust the chamber pressure, the valve can have the function of stopping the degree of valve opening at a desired position (conductance valve).

As in the case of KOSLARZE, it consists of a valve casing, valve plate, and drive section. The opening is round-shaped for connection with a vacuum pump. Among our products, MARINA is compatible.

Features

After moving the valve plate to the opening position, the valve plate is pressed against the opening seat part. The valve plate incorporates an elastic material (O-ring), and its repulsive force secures seal performance. Rotational motion (motion like a pendulum bob) to the opening position and sealing operation are performed by each air cylinder through O-rings.

Stable seal performance is secured by performing sealing operation at a position extremely close to the opening section with the air cylinder mounted inside the valve plate. Also, if high seal performance for isolation between the atmosphere and vacuum is required, the pressure differential acting on the valve plate can be significantly reduced by mounting bellows to cancel the differential pressure inside the valve plate.

How to use

It is mounted between a chamber and vacuum pump. In the case of a conductance valve, the intermediate stop position should be adjusted by the user.

Large-size rectangular type gate valve

This large opening gate valve is particularly suited for super-large substrates. Among our lineup of products, GARIVA which adopts a differential pressure cancellation mechanism is compatible. With our delivery record of large-size valves of 3000mm or more in opening size, this valve is stable in sealing operation with high reliability.

Features

In order to secure high seal performance, it is necessary to uniformly compress the seal material of the valve plate even for a large opening. In order to realize this, there is a method by which the valve plate is pressed at multiple points by increasing the number of KOSLARZE units, or a type that drives the seal at a position extremely close to the opening section by mounting an air cylinder inside the valve plate (GARIVA).

As for GARIVA, the pressure differential acting on the valve plate can be significantly reduced by mounting bellows for cancelling the differential pressure inside the valve plate as in the case of MARINA. While the drive section of KOSLARZE exposed on the atmosphere side is large-scale, the drive section of GARIVA is low in rigidity and light in weight.

How to use

It is mounted with the valve casing sandwiched by the front and back chamber as in the case of KOSLARZE. For GARIVA, it is not compatible with the type which directly seals the opening section of the chamber with the valve plate (direct mount).

L-shape valve

An L-shape valve is a long lifetime vacuum valve incorporating our field-proven formed/welded bellows. It is mainly used as a partition of an exhaust system by installing it between a chamber and roughing pump.

Features

This is a high-vacuum valve having a long lifetime with our field-proven formed/welded bellows incorporated. In addition to common products, slow exhaust valves, having the potential to prevent particles from swirling up, are also available (25A/40A/50A).

How to use

It is mounted between a chamber and roughing pump. The mounting direction is unrestricted, but unless otherwise specified, use in a posture of directing the valve plate toward the side with greater pressure variation.

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Products guidance

Metal bellows Metal bellows
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Flexible tubes
Vacuum valves Vacuum valves
Rectangular type gate valves
Round type gate valves
Large-size rectangular type
gate valves
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(Angle valves)
Vacuum piping Vacuum piping parts
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