Motor-driven type bellows-sealed linear feedthrough

Schematic diagram of bellows-sealed linear feedthrough

SpecificationsProduct catalogCAD drawing

CAD drawing download (member registration required)

The following show basic specifications. Each product will be designed individually at the time of each order.

About model designation --- Please fill in the necessary stroke at the end of the model.

(Example) ILD-70A with a stroke of 100mm: ILD-70A100

                                       
Model ILD-70A ILD-114A
End of model 50 100 150 50 100 150
Stroke (mm) 50 100 150 50 100 150
Connection flange CF70 CF114
Drive method Motor-driven
Leak rate 1×10-9Pa・m3/s or less
Baking temperature -
Main material SUS304
Bellows material SUS316L
Main dimensions A 50~150 50~200 50~150 50~200
B 334 459 345 465
C 96 101
D 152 165
φE 38 48
φF(g6) 12 16
G 20 35
H 7.0 12.5
φI(h7) 8 14
Product drawing download pdf pdf pdf pdf pdf pdf
                                                                                                                                                                                   
Model ILD-152A ILD-203A
End of model 100 150 200 100 150 200
Stroke (mm) 100 *150 *200 100 *150 *200
Connection flange CF152 CF203
Drive method Motor-driven
Leak rate 1×10-9Pa・m3/s or less
Baking temperature -
Main material SUS304
Bellows material SUS316L
Main dimensions A 50~150 50~150
B 330 330
C 107 107
D 170 170
φE 60 60
φF(g6) 24 24
G 35 35
H 20.0 20.0
φI(h7) 22 22
Product drawing download - - - - - -
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* The automatic type (ILD-70A, 114A) with a stroke of 50mm and (ILD-152A, 203A) with a stroke of 150mm or 200mm is designed individually. For length (B), contact us separately.

<When ordering>
Detailed specifications and dimensions are also introduced in product catalogs.
For delivery time, price and other questions about products, please inquire from there.

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